Kinetic modelling of atom production and thermalization in CCRF discharges in H2

Academic Article

Publication Date:

2013

abstract:

[object Object]

Iris type:

01.01 Articolo in rivista

Keywords:

Idrogeno; RF; materiali; modelli

List of contributors:

Authors of the University:

PANARESE ANTONIO

Handle:

Published in:

Journal

URL