Reference-free evaluation of thin films mass thickness and composition through energy dispersive X-ray spectroscopy

The electron transport model is derived from the Boltzmann transport equation and it exploits the most updated and reliable physical parameters in order to obtain an accurate description of the phenomenon. The method for the calculation of film mass thickness and composition is validated with benchmarks from standard techniques. In addition, a model uncertainty and sensitivity analysis is carried out and it indicates that the mass thickness accuracy is of the order of 10 mu g/cm(2), which is comparable to the nuclear standard techniques resolution.