Pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3: Plasma plume effects

The pulsed laser deposition of SrTiO(3)/LaGaO(3) and SrTiO(3)/LaAlO(3) interfaces is analyzed with a focus on the kinetic energy of the ablated species. LaGaO(3) and LaAlO(3) plasma plumes were studied by fast photography and space-resolved optical emission spectroscopy. Reflection high energy electron diffraction was performed proving a layer-by-layer growth up to 10(-1) mbar oxygen pressure. The role of the energetic plasma plume on the two-dimensional growth and on the presence of interfacial defects at different oxygen growth pressures is discussed in connection with the conducting properties of the polar/nonpolar interfaces. (C) 2010 American Institute of Physics. [doi:10.1063/1.3529487]