Gas phase and surface processes in silicon tetrachloride glow discharge

Conference Paper
Publication Date:
1985
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/116046
Book title:
7th International Symposium on Plasma Chemistry, (ISPC-7) Proceedings IUPAC