Deposition mechanism in (GD)µc-Si:H,Cl film preparation:kinetic evidences

Conference Paper
Publication Date:
1984
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/116043
Book title:
7th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, (ESCAMPIG-VII)