Continuous and modulated deposition of fluorocarbon films by means of C-C4F8 plasmas

Conference Paper
Publication Date:
2003
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/145398
Book title:
16th International Symposium on Plasma Chemistry, (ISPC-16) Proceedings IUPAC