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Dopant profiling on ultrashallow junctions in Si with ADF-STEM
Conference Paper
Publication Date:
2007
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Morandi, Vittorio; Merli, PIER GIORGIO; Parisini, Andrea
Authors of the University:
MORANDI VITTORIO
PARISINI ANDREA
Handle:
https://iris.cnr.it/handle/20.500.14243/144622
