Publication Date:
2006
abstract:
The paper presents the design and yield analysis of a
tunable bandpass filter consisting of capacitive coupled
distributed MEMS transmission lines. It is used an accurate
equivalent circuit based on the electromagnetic MEMS analysis
results. The yield analysis takes into account the filter parameter
dispersion due to the technological resolution.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Microwave Filters
List of contributors:
Bartolucci, Giancarlo; Marcelli, Romolo
Book title:
Proceedings of the 2006 German Microwave Conference, GeMIC 2006