Accurate design and yield analysis of tunable distributed MEMS bandpass filter
Contributo in Atti di convegno
Data di Pubblicazione:
2006
Abstract:
The paper presents the design and yield analysis of a
tunable bandpass filter consisting of capacitive coupled
distributed MEMS transmission lines. It is used an accurate
equivalent circuit based on the electromagnetic MEMS analysis
results. The yield analysis takes into account the filter parameter
dispersion due to the technological resolution.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Microwave Filters
Elenco autori:
Bartolucci, Giancarlo; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 2006 German Microwave Conference, GeMIC 2006