Chromium oxide wear and corrosion protection coatings deposited via MOCVD

... Here we investigate Cr2O3 chromia film deposition via metalorganic chemical vapour deposition (MOCVD) on Fe-Cr-Ni AISI304 stainless steel (Cr18.2, Ni 9.07, Mn 1.73, Si 0.6, C 0.0022 wt%). For characterization purposes films were deposited also on (001) silicon wafers. Chromia film growth was compared for three different precursors: (1) Cr(CO)6, (2) Cr(III)hexafluoro-acetyl-acetonate and (3) tris (2,2,6,6-tetramethyl-3,5-heptane-ditionatohromium (III). The morphological, structural and chemical properties of the films were compared. The most useful precursor was found to be Cr(CO)6 and the films obtained with this precursor were further investigated by scratch testing and nonoindentation to determine the film adhesion and coating hardness.