Deposition of alumina thin films by MOCVD for wear and corrosion protection of steel

In the present work we preport the results of an investigation of the compositional, morphological and nanomechanical properties of alumina thin films obtained by MOCVD, using the new aluminium source. Films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), Rutherford Backscattering (RBS) and nanoindentation. Besides, the study of the effects of different annealing conditions on the surface morphology and nanomechanical properties of the coating have been considered.