Data di Pubblicazione:
2008
Abstract:
Measuring flats in the horizontal posture with interferometers is analyzed in detail, taking into account the sag produced by gravity. A mathematical expression of the bending is provided for a plate supported at three unevenly spaced locations along the edge. It is shown that the azimuthal terms of the deformation can be recovered from a three-flat measuring procedure, while the pure radial terms can only be estimated. The effectiveness of the iterative algorithm for data processing is also demonstrated. Experimental comparison on a set of three flats in horizontal and upright posture is provided.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
optical testing; absolute planarity; optical metrology
Elenco autori:
Molesini, Giuseppe; Vannoni, Maurizio
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