Data di Pubblicazione:
2005
Abstract:
The use of a simplified version of the liquid mirror approach to validate absolute planarity reference flats is described in detail. It is shown that the approach can serve the purpose, providing a measurement of the peak-to-valley departure from planarity that in experiments is within 7 nm uncertainty (2ó) over a diameter of 90 mm
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
metrologia ottica; interferometria; planarità assoluta; specchio liquido
Elenco autori:
Molesini, Giuseppe; Vannoni, Maurizio
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