Optical properties of scandium films in the far and the extreme ultraviolet

The optical properties of thin Se films deposited in ultrahigh-vacuum conditions have been investigated in the 6.7-174.4-nm spectral range. We measured transmittance and multiangle reflectance in situ in the 53.6-174.4 nm spectral range and used these measurements to obtain the complex refractive index of a Sc film at every individual wavelength investigated. Transmittance measurements were made of Sc samples that were deposited over grids coated with a support C film. The transmittance and the extinction coefficient of Sc films at wavelengths shorter than 30 nm were measured ex situ. The ex situ samples were protected with an additional top C film before their removal from vacuum. To our knowledge, these are the first optical measurements of Sc films reported in the spectral ranges cited. (C) 2004 Optical Society of America.