Silicon Doping Effect on SF6/O2 plasma chemical texturing

Academic Article

Publication Date:

2011

Iris type:

01.01 Articolo in rivista

List of contributors:

Capezzuto, Pio; Losurdo, Maria; Bruno, Giovanni; Giangregorio, MARIA MICHELA; Bianco, GIUSEPPE VALERIO

Authors of the University:

BIANCO GIUSEPPE VALERIO

GIANGREGORIO MARIA MICHELA

Handle:

https://iris.cnr.it/handle/20.500.14243/22797

Published in:

JOURNAL OF APPLIED PHYSICS

Journal