Nanostructuring Si C alloys by plasma enhanced chemical vapor deposition: An ellipsometry and Raman spectroscopy investigation

Academic Article
Publication Date:
2011
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/22796
Published in:
THIN SOLID FILMS
Journal