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Optimized deep wet etching of borosilicate glass through Cr-Au-resist mask.
Academic Article
Publication Date:
2003
abstract:
Iris type:
01.01 Articolo in rivista
List of contributors:
Foglietti, Vittorio
Authors of the University:
FOGLIETTI VITTORIO
Handle:
https://iris.cnr.it/handle/20.500.14243/22656
