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ZnO nanowires strips growth: Template reliability and morphology study

Academic Article
Publication Date:
2014
abstract:
In this work we report on hydrothermal growth of ZnO nanostructures obtained by using strip-shaped resist templates made by electron beam lithography, with particular focus on: (i) the effects of materials used and processing on the template adhesion and its stability during wet growth; (ii) the influence of the template pattern dimensions on the nanowires morphology. Templates made of patterned films with methylmethacrylate-methacrylic acid copolymer showed greater adhesion and stability with respect to the commonly used poly (methylmethacrylate) electron resist or to the use of thin adhesion-promoter photoresist layers. The growth of nanowires in strip-shaped methyl methacrylate-methacrylic acid copolymer templates has been investigated using typical hydrothermal growth parameters and a marked dependence of nanowires length and diameter has been found on the template size for strips narrower than about 2 ?m. © 2014 Elsevier B.V. All rights reserved.
Iris type:
01.01 Articolo in rivista
Keywords:
Electron beam lithography; Hydrothermal growth; Nanowires; Resist adhesion; Zinc oxide
List of contributors:
Pea, Marialilia; Giovine, Ennio; Notargiacomo, Andrea; Maiolo, Luca; Pilloton, Roberto
Authors of the University:
GIOVINE ENNIO
MAIOLO LUCA
NOTARGIACOMO ANDREA
PEA MARIALILIA
PILLOTON ROBERTO
Handle:
https://iris.cnr.it/handle/20.500.14243/256219
Published in:
MICROELECTRONIC ENGINEERING
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