On-wafer method for experimental characterization of MEMS matrix, using a two-port Vector Network Analyzer
Chapter
Publication Date:
2009
abstract:
The paper presents an experimental method useful to characterize a
multiport circuit, in particular a MEMS (Micro-Electro-Mechanical System) matrix,
using a two-port VNA (Vector Network Analyzer). As example, the method is applied
for a four-port circuit (a coupler). The results obtained by using this method and the
expected results obtained by simulation are in good agreement.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; multi-port measurements
List of contributors:
Bartolucci, Giancarlo; Marcelli, Romolo
Book title:
New Developments in Micro Electro Mechanical Systems for Radio Frequency and Millimeter Wave Applications