Characterization of MIM Capacitors for the Investigation of RF MEMS Switch Charging Effects

Chapter
Publication Date:
2010
abstract:
MIM capacitors used for actuating RF MEMS have been studied for investigating charging effects.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; MIM; Charging
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/139294
Book title:
Microwave and Millimeter Wave MEMS