Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

Academic Article
Publication Date:
2006
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/21027
Published in:
APPLIED PHYSICS LETTERS
Journal