Data di Pubblicazione:
2003
Abstract:
The preparation thin films of Mo and W mixed oxides by reactive sputtering, assisted by the selective sublimation processing technique was discussed. Diffusion of Mo ions towards the film surface and sublimation of MoO 3 were observed. The analysis showed that the presence of dispersed Mo and W anion in the WO3 or MoO3 phases inhibited grain coalescence upon annealing.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
Annealing; Molybdenum; Negative ions; Oxides; Sputtering; Sublimation; Tungsten; Reactive sputtering; Thin films
Elenco autori:
Vomiero, Alberto
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