Superconducting Y-Ba-Cu-O oxide films by sputtering

We have prepared superconducting thin films of Y-Ba-Cu-O with T c onsets above 95 K by both diode and magnetron sputtering.Films with full superconductivity (R=0) at 85 K have been produced by dc magnetron sputtering. The compositions of the films are fairly uniform across an area 50 mm in diameter and through the film thickness. Structural properties of the films were studied by x-ray diffraction. Critical current densities in the range of 3000 to 104 A/cm2 have been measured at 4.2 K.