Publication Date:
1999
abstract:
Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology.
Iris type:
01.01 Articolo in rivista
List of contributors:
Leo, Gabriella; Mazzer, Massimo; Capone, Simonetta; Rella, Roberto; Siciliano, PIETRO ALEARDO
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