Electron and ion beam analysis of composition and strain in Si-x Ge x/Si heterostructures

Academic Article

Publication Date:

1994

Iris type:

01.01 Articolo in rivista

Keywords:

SILICON-GERMANIUM ALLOYS; COMPOSITION DETERMINATION; LATTICE STRAIN DETERMINATION; CONVERGENT BEAM ELECTRON DIFFRACTION; ION BEAM ANALYSIS

List of contributors:

Authors of the University:

BALBONI ROBERTO

Handle:

Published in:

Journal