Publication Date:
2002
abstract:
In this paper, the technology for the realization of micromachined millimeter wave devices on dielectric membranes will be described. Examples of filters and antennas obtained on thin trilayers made by SiO2/Si3N4/SiO2 structures will be given, and their microwave response will be shown.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
Micromachining; Millimeter Waves; Membranes
List of contributors:
Marcelli, Romolo
Book title:
Sensors and Microsystems, Proceedings of the 7th Italian Conference