Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

Academic Article
Publication Date:
1997
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/15490
Published in:
THIN SOLID FILMS
Journal