TiO2 coating by atmospheric pressure MOCVD in a conveyor belt furnace for industrial applications

An inexpensive, high-volume CVD production system for a protective oxide coating is described. The critical point with such a process is the precursor mixer and injector head? and an original and simple structure has been designed (see Figure). Uniform, adherent, good quality TiO2 anatase films have been obtained and their functionality at high temperatures has been tested