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MOCVD of praseodymium based films high k dielectric deposited on silicon substrate
Conference Paper
Publication Date:
2003
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Raineri, Vito; LO NIGRO, Raffaella; Toro, ROBERTA GRAZIA
Authors of the University:
LO NIGRO RAFFAELLA
TORO ROBERTA GRAZIA
Handle:
https://iris.cnr.it/handle/20.500.14243/131744
