Temperature dependence of ion assisted epitaxial growth of chemical vapor deposited Si layers

Conference Paper
Publication Date:
1988
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/248584
Published in:
MATERIALS RESEARCH SOCIETY SYMPOSIA PROCEEDINGS
Journal