Layer and interface structure of CoFe/Ru multilayers

Grazing incidence X-ray scattering measurements have been performed to probe the structure of CoFe/Ru layers and their interfaces. It was found that the interface width increased approximately linearly with the layer number from the substrate in a multilayer and that a substantial asymmetry existed between the width of CoFe/Ru and Ru/CoFe interfaces. By co-minimizing both the specular and diffuse scatter with that simulated from a model structure, the topological roughness amplitude was determined to be comparable to the intermixing interface width.