Publication Date:
2004
abstract:
Convergent beam electron diffraction is a technique available in any modern transmission electron microscope. It allows the determination of the strain tensor in crystals at the nanometer scale. The basic principles of the method and examples of application to microelectronic devices are given.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
List of contributors:
Balboni, Roberto; Armigliato, Aldo
Book title:
HIGH-PRESSURE CRYSTALLOGRAPHY
Published in: