Investigation of sputtered amorphous silicon and silicon oxynitride multilayers

Abstract
Publication Date:
2004
Iris type:
04.02 Abstract in Atti di convegno
Keywords:
silicon oxynitride; multilayers
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/129951
Book title:
10th Joint Vacuum Conference (JVC-10)