Strain release management in SiGe/Si films by substrate patterning

Academic Article
Publication Date:
2014
abstract:
[object Object]
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/245311
Published in:
APPLIED PHYSICS LETTERS
Journal