Effect of composition and preparation conditions on the microstructure of lead zirconate titanate films

The crystallization behaviour of thin films of composition Pb1.1ZrxTi1 - xO3, where x = 0.75 and 0.25, prepared by a sol-gel route, have been studied using grazing angle X-ray diffraction and transmission electron microscopy. The X-ray diffraction was done at different incident angles and revealed different structures as the penetration into the film increased. Titanium-rich films were mainly perovskite with titanium oxide that may have formed within the film during its crystallization. The pyrochlore phase in the zirconium-rich film is more evident near the surface; this is also confirmed by microscopy of the film in cross section. In addition, an irregular distribution of the titanium, used as the adhesion layer was also seen on the micrographs. The electrical measurements evidence some correlation with the micro-structure observed.