Nanoscale characterization of MOS systems by microwaves: Dopant profiling calibration
Contributo in Atti di convegno
Data di Pubblicazione:
2015
Abstract:
The paper presents a calibration of scanning microwave microscopy signals for doping profiling in MOS systems. The experimentally obtained S-parameters are matched through a linear relation to the calculated MOS system capacitance and then to doping. The proposed approach is verified by simulations with the equivalent LCR circuit as well as by experimental results obtained on a calibration sample with differently doped areas.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
Calibration; Doping Profiling; RF Characterization; Scanning Microwave Microscopy (SMM); Semiconductors
Elenco autori:
Lucibello, Andrea; Michalas, Loukas; Proietti, Emanuela; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Ultimate Integration on Silicon (EUROSOI-ULIS), 2015 Joint International EUROSOI Workshop and International Conference on