Smart integration of Si NWs arrays in all-silicon thermoelectric micronanogenerators

In this work two alternative approaches are introduced for automatically integrating large numbers of several ?ms long Si NWs in lateral thermoelectric devices. Both cases being planar require a thermally isolated platform to be defined by silicon micromachining. This opens the path to all-silicon thermal harvesters, which can be built in large volumes offering a cost-effective energy harvesting solution where thermal gradients are present.