Laser doping of silicon: role of the surface status in the incorporation mechanism

Academic Article

Publication Date:

1989

Iris type:

01.01 Articolo in rivista

List of contributors:

Bentini, GIAN GIUSEPPE; Correra, Luigi; Nipoti, Roberta; Bianconi, Marco

Authors of the University:

BIANCONI MARCO

Handle:

https://iris.cnr.it/handle/20.500.14243/182239

Published in:

APPLIED SURFACE SCIENCE

Journal