Damage profiles in high-energy As implanted Si

Academic Article

Publication Date:

2000

Iris type:

01.01 Articolo in rivista

List of contributors:

Lulli, Giorgio; Bianconi, Marco; Parisini, Andrea

Authors of the University:

BIANCONI MARCO

PARISINI ANDREA

Handle:

https://iris.cnr.it/handle/20.500.14243/182209

Published in:

JOURNAL OF APPLIED PHYSICS (ONLINE)

Journal