Silicon single electron transistor fabricated by anisotropic etch and oxidation

Abstract
Publication Date:
2005
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/174557
Book title:
Book of Abstracts of the 31st International Conference on Micro and Nano Engineering (MNE 2005)