X-ray standing wave study of Si/Ge superlattices

In this paper we used the X-ray standing wave (XSW) technique to investigate the (GemSin)p/Si(001) superlattice structure. This technique, being sensitive to both the modulus and phase of the structure factor, is a powerful tool to get structural information at atomic level. Unlike standard XSW where the standing wave field is generated in the substrate, here we studied both theoretically and experimentally the properties of the standing wave field generated in correspondence with the superlattice satellite peak close to the (004) reflection, whose periodicity is equal to the average lattice spacing of the superlattice. The information obtained on the superlattice structure from the combined use of diffraction and XSW will be discussed.