An old workhorse for new applications: Fe(dpm)3 as precursor for low-temperature PECVD of iron(III) oxide
Academic Article
Publication Date:
2015
abstract:
An iron(III) beta-diketonate complex, Fe(dpm)3 (Hdpm = 2,2,6,6-tetramethyl-3,5-heptanedione), has been investigated
as a potential precursor for plasma enhanced chemical vapor deposition (PECVD) of iron(III) oxide
nanomaterials. Thanks to the combined experimental-theoretical approach, spectroscopic properties, spin
state, thermal behavior and fragmentation pathways of Fe(dpm)3 have been carefully analysed, obtaining
an excellent agreement between simulation and experiment. Preliminary PECVD tests evidenced the
possibility of obtaining pure and homogeneous Fe2O3 deposits with controlled nano-organization at
temperatures as low as 100°C, even on flexible plastic substrates. The present results open up intriguing
perspectives for the exploitation of Fe(dpm)3 as an efficient molecular source for the preparation of
nanostructured iron(III) oxides to be used in energetics and gas sensing applications.
Iris type:
01.01 Articolo in rivista
Keywords:
Fe(dpm)3; Fe2O3; precursor; PE-CVD
List of contributors:
Venzo, Alfonso; Seraglia, Roberta; Barreca, Davide
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