Fabrication of hybrid organic-inorganic vertical microcavities through imprint lithography

We report on the fabrication of hybrid organic-inorganic vertical microcavities by using imprint lithography tools. The device consists of an organic active layer (rubrene-PMMA blend) embedded between two dielectric distributed Bragg reflectors (DBR). The active organic layer was spin coated on the first DBR, whereas a SU8 lithographic pattern was realized on the second DBR, which was used as the imprint mold. The two parts were then assembled together in an imprint process in order to create a vertical microcavity constituted by the rubrene active layer between two high-reflectivity mirrors. The effectiveness of this technology is demonstrated by the room temperature photoluminescence spectra, recorded on the fabricated microcavity, which show a sharp emission peak at the microcavity resonance wavelength.