Static & dynamic MEMS device characterisation

Two procedures that are suitable for the static and dynamic characterization of the Micro Electro Mechanical Systems (MEMS) structures, responding to the microtechnology field requirements of developing simple and standard procedures enabling the improvement of the MEMS product design flow, are discussed. The methodology based on capacitance measurement exploits the general layout of electrostatic actuated devices for characterizing the system static response based on the capacitive variation. While the Laser Doppler Vibrometer (LDV) method is suitable for measuring the vibrational velocity and displacement of structures excited by a random frequency signal. This methodology is based upon the physical principle of the Doppler phenomenon and optical measurements and can be applied to a wide range of structures, including non-capacitive MEMS.