Combined high resolution X-ray diffraction and EXAFS studies of Si(1-x)Gex heterostructures

In this paper, we compare the structural information obtained by measuring X-ray diffraction reciprocal space maps and by EXAFS analysis on two Si(1-x)Gex alloys with low (LC) and high (HC) Ge concentration. From the analysis of the X-ray diffraction maps we determined the alloy lattice parameters for the cubic cell (a = 5.58 Å) of the fully relaxed HC sample and for the tetragonal cell (a = 5.43 Å