Deposition of nanocrystalline metal films by cluster beams produced by a pulsed arc cluster ion source

We report preliminary results on the synthesis of nanocrystalline thin films by cluster beam deposition. Clusters of refractory metals and alloys are produced by a Pulsed Are Cluster Ion Source. We have characterizaed the beam by mass spectrometry. Nanocrystalline TiO2 and nickel-titanium films have been produced and characterized. A structure based on particles of several nanometers of diameters is observed.