Thermally oxidized zinc oxide nanowires for use as chemical sensors

Zinc oxide (ZnO) mat-based conductometric devices were fabricated using a thermal oxidation technique. A metallic zinc layer was deposited on the alumina transducer and then oxidized in a controlled atmosphere, in order to obtain ZnO nanostructures. Two different batches of sensors have been prepared, and their sensing performances have been evaluated towards oxidizing and reducing gases. Functional measurements showed very good sensing performances towards ethanol and acetone at 500°C, and NO2 at 200°C, indirectly confirming the n-type behaviour of the material. The influence of the humidity on the response has been explored. In practical conditions the interference of humidity is very small, and could be neglected in many applications. Simultaneous measurements on different devices from the same batch confirm the high reproducibility of the response within the batch