Interface quality of atomic layer deposited La-doped ZrO2 films on gepassivated In0.15Ga0.85As substrates

Conference Paper
Publication Date:
2010
abstract:
[object Object]
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/291803
Published in:
MATERIALS RESEARCH SOCIETY SYMPOSIA PROCEEDINGS
Journal