Design of Band-Pass Micromachined Filters based on fixed-fixed Beam Resonators

Cascaded, two- and three-stages band-pass filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F1=10 MHz and F2=20 MHz. Quality factors Q=500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW=0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated.