Microstrip Transducers Optimisation for Band Pass Micropackaged Magnetostatic Wave Resonators
Conference Paper
Publication Date:
2004
abstract:
In this paper the design of microstrip line configurations to be used for band pass magneto static wave resonators on silicon microprocessed substrates has been studied. Two configurations have been simulated: (i) grounded microstrip lines and (ii) loaded ones by 50 ? resistors. Microprocessing of the substrate is proposed to improve the micropackaging of the resonator and its electrical matching with the transducers. Further to the improvement expected from the microprocessing allows a better isolation for broadband applications.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Magnetostatic Waves; Micromachining; Micro-packaging
List of contributors:
Marcelli, Romolo
Book title:
Proceedings of the 2004 International Semiconductor Conference, IEEE CAS 2004